US 12,467,125 B2
Loading apparatus for deposition mask
Kyongho Hong, Hwaseong-si (KR); Myungkyu Kim, Cheonan-si (KR); Chang-Kon Park, Cheonan-si (KR); Sukbeom You, Anyang-si (KR); and Dongjae Lee, Cheonan-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do (KR)
Filed by Samsung Display Co., LTD., Yongin-si (KR)
Filed on Aug. 24, 2022, as Appl. No. 17/894,625.
Claims priority of application No. 10-2021-0154322 (KR), filed on Nov. 10, 2021.
Prior Publication US 2023/0147723 A1, May 11, 2023
Int. Cl. C23C 14/04 (2006.01)
CPC C23C 14/042 (2013.01) 20 Claims
OG exemplary drawing
 
1. A loading apparatus for a deposition mask, the loading apparatus comprising:
a clamper configured to clamp a mask extending in a first direction; and
a picker including:
a first adsorption part;
a second adsorption part; and
a connection part connected to the first adsorption part and the second adsorption part, and configured to transfer the mask to the clamper, wherein
when the picker transfers the mask, the first adsorption part adsorbs ends of the mask and the second adsorption part adsorbs a portion of the mask between the ends of the mask, and
the clamper is configured to clamp the mask between the first adsorption part and the second adsorption part.