US 12,466,724 B2
MEMS mirror and MEMS mirror array system
Takashi Naiki, Kyoto (JP)
Assigned to ROHM CO., LTD., Kyoto (JP)
Filed by ROHM Co., LTD., Kyoto (JP)
Filed on Nov. 22, 2022, as Appl. No. 18/057,852.
Claims priority of application No. 2021-190008 (JP), filed on Nov. 24, 2021.
Prior Publication US 2023/0159323 A1, May 25, 2023
Int. Cl. G02B 26/08 (2006.01); B81B 7/02 (2006.01)
CPC B81B 7/02 (2013.01) [G02B 26/0858 (2013.01); B81B 2201/042 (2013.01); B81B 2203/0109 (2013.01); B81B 2203/04 (2013.01); B81B 2207/053 (2013.01)] 7 Claims
OG exemplary drawing
 
1. A microelectromechanical systems mirror comprising:
a flat plate that is displaceable in a film thickness direction;
a frame part that is separated from the flat plate and surrounds the flat plate;
a mirror on the flat plate;
a wiring on an outer edge of the flat plate, wherein the wiring surrounds the mirror on the flat plate;
a support part that connects the flat plate and the frame part and is smaller in film thickness than the frame part; and
a piezoelectric body that is arranged on the support part, wherein a control voltage is applied to the piezoelectric body to deform the piezoelectric body and deform the support part together with the deformation of the piezoelectric body, wherein the piezoelectric body is configured to adjust a spring constant of the support part based on the control voltage.