US 12,466,722 B2
MEMS sound transducer with a damping layer made of adhesive
Andrea Rusconi Clerici Beltrami, Vienna (AT); and Ferruccio Bottoni, Graz (AT)
Assigned to USOUND GMBH, Graz (AT)
Filed by USound GmbH, Graz (AT)
Filed on Dec. 2, 2022, as Appl. No. 18/073,879.
Claims priority of application No. 10 2021 131 976.5 (DE), filed on Dec. 3, 2021; and application No. 10 2021 133 329.6 (DE), filed on Dec. 15, 2021.
Prior Publication US 2023/0174369 A1, Jun. 8, 2023
Int. Cl. B81B 3/00 (2006.01)
CPC B81B 3/0021 (2013.01) [B81B 2201/0257 (2013.01); B81B 2203/0118 (2013.01); B81B 2203/0127 (2013.01); B81B 2203/0163 (2013.01); B81B 2203/0315 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A transducer unit configured for a MEMS sound transducer, wherein the MEMS sound transducer includes a diaphragm, the transducer unit comprising:
a support,
a first transducer element, which is connected to the support and is configured to be deflectable in a direction along a reciprocation axis,
a coupling element configured for connecting the first transducer element to the diaphragm in a manner that leaves the diaphragm spaced apart from the first transducer element in the direction of the reciprocation axis, wherein the coupling element is movable in the direction along the reciprocation axis, and
a spring region formed between the first transducer element and the coupling element, the spring region including a first spring element, which elastically connects the transducer element to the coupling element, and wherein the spring region includes a damping layer, which at least partially covers the first spring element,
wherein the damping layer is made of a cured adhesive.