US 12,466,184 B2
Liquid ejecting head, liquid ejecting apparatus, and piezoelectric device
Yasushi Yamazaki, Azumino (JP); Masaki Mori, Shiojiri (JP); and Eiju Hirai, Azumino (JP)
Assigned to Seiko Epson Corporation, Tokyo (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on May 23, 2023, as Appl. No. 18/322,423.
Claims priority of application No. 2022-085846 (JP), filed on May 26, 2022.
Prior Publication US 2023/0382114 A1, Nov. 30, 2023
Int. Cl. B41J 2/14 (2006.01); H10N 30/20 (2023.01)
CPC B41J 2/14233 (2013.01) [H10N 30/2047 (2023.02)] 16 Claims
OG exemplary drawing
 
1. A liquid ejecting head comprising:
a piezoelectric element including a first electrode, a piezoelectric layer, and a second electrode;
a first conductive layer electrically coupled to the second electrode;
an insulating layer formed of an insulating material;
a vibration plate that is vibrated when the piezoelectric element is driven; and
a pressure chamber plate defining a pressure chamber that applies pressure to a liquid when the vibration plate is driven, wherein
the vibration plate, the first electrode, the piezoelectric layer, and the second electrode are stacked in this order from a side of the pressure chamber plate in an active area facing the pressure chamber, and
an area located outwardly from the active area in a first direction includes: a first area in which the piezoelectric layer, the second electrode, the insulating layer, and the first conductive layer are stacked in this order in a second direction that intersects the first direction; and a second area in which the piezoelectric layer and the insulating layer are stacked in this order in the second direction without the second electrode and the first conductive layer.