US 12,465,955 B2
Substrate treatment method and substrate treatment device
Toru Endo, Kyoto (JP); Hideji Naohara, Kyoto (JP); Yuji Okita, Kyoto (JP); Katsuei Higashi, Kyoto (JP); Takahiro Yamaguchi, Kyoto (JP); Ryuta Tsukahara, Kyoto (JP); and Akira Ishimaru, Kyoto (JP)
Assigned to SCREEN Holdings Co., Ltd., Kyoto (JP)
Appl. No. 18/254,830
Filed by SCREEN Holdings Co., Ltd., Kyoto (JP)
PCT Filed Oct. 29, 2021, PCT No. PCT/JP2021/039949
§ 371(c)(1), (2) Date May 26, 2023,
PCT Pub. No. WO2022/113641, PCT Pub. Date Jun. 2, 2022.
Claims priority of application No. 2020-197918 (JP), filed on Nov. 30, 2020.
Prior Publication US 2024/0001411 A1, Jan. 4, 2024
Int. Cl. B08B 3/08 (2006.01); B08B 3/10 (2006.01)
CPC B08B 3/08 (2013.01) [B08B 3/10 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A substrate processing method comprising:
a substrate holding step of holding a substrate at a holding position surrounded by a cylindrical guard;
a processing liquid supplying step of supplying a surface of the substrate to be processed with a processing liquid that process the surface of the substrate to be processed while rotating the substrate held at the holding position about a rotation axis passing through a central portion of the substrate;
an image acquiring step of acquiring an image of the surface of the substrate to be processed and an image of an inner wall surface of the guard while supplying the processing liquid to the surface of the substrate to be processed; and
a determining step of monitoring luminance value of the images obtained in the image acquiring step and determining whether or not a predetermined change occurs in the luminance value of the image of the surface of the substrate to be processed and the luminance value of the image of the inner wall surface of the guard, wherein
in a case where the predetermined change does not occur in the luminance values of the images obtained in the image acquiring step before a predetermined notification time elapses after a start time point of monitoring of the luminance values, a notifying step of notifying that the predetermined change does not occur in the luminance values of the images obtained in the image acquiring step is executed, and
in a case where the predetermined change occurs in the luminance values of the images obtained in the image acquiring step before the notification time elapses after the start time point, a detecting step of detecting a processing end time point at which processing of the surface of the substrate to be processed with the processing liquid is ended is executed.