US 12,465,948 B2
PMUT array with presence of separate sensing small PZT on membranes edge
Domenico Giusti, Caponago (IT); Marco Ferrera, Concoerezzo (IT); and Fabio Quaglia, Pizzale (IT)
Assigned to STMicroelectronics International N.V., Geneva (CH)
Filed by STMicroelectronics International N.V., Geneva (CH)
Filed on Feb. 9, 2023, as Appl. No. 18/107,893.
Prior Publication US 2024/0269708 A1, Aug. 15, 2024
Int. Cl. B06B 1/06 (2006.01); B06B 1/02 (2006.01); H10N 30/20 (2023.01); H10N 30/30 (2023.01); H10N 30/50 (2023.01)
CPC B06B 1/0622 (2013.01) [B06B 1/0666 (2013.01); H10N 30/2047 (2023.02); H10N 30/308 (2023.02); H10N 30/50 (2023.02); B06B 1/0215 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An array of ultrasound devices, each ultrasound device comprising:
a membrane;
a first piezoelectric stack carried by the membrane and forming, together with the membrane, a first piezoelectric micromachined ultrasonic transducer (PMUT); and
a plurality of second piezoelectric stacks carried by the membrane and positioned about a periphery thereof, each second piezoelectric stack forming, together with the membrane, a second PMUT;
wherein, during operation, the first piezoelectric stack is configured to vibrate the membrane in response to application of an alternating voltage to the first piezoelectric stack to thereby generate at least one outgoing ultrasonic pulse toward a target; and
wherein, during operation, the plurality of second piezoelectric stacks are configured to generate sense voltages in response to bending thereof induced by vibration of the membrane by incoming ultrasonic reflections off the target.