US 12,465,935 B2
Unit for storing liquid and apparatus for treating substrate
Moon Soon Choi, Cheonan-si (KR); Chae Young Lim, Cheonan-si (KR); Do Gyeong Ha, Daegu (KR); and Gu Yeol An, Busan (KR)
Assigned to Semes Co., Ltd., Chungcheongnam-do (KR)
Filed by SEMES CO., LTD., Cheonan-si (KR)
Filed on Sep. 9, 2022, as Appl. No. 17/941,526.
Claims priority of application No. 10-2021-0124786 (KR), filed on Sep. 17, 2021.
Prior Publication US 2023/0089188 A1, Mar. 23, 2023
Int. Cl. B05B 9/04 (2006.01); B65D 1/32 (2006.01); H01L 21/67 (2006.01); B05C 11/10 (2006.01); B08B 3/02 (2006.01)
CPC B05B 9/0403 (2013.01) [B65D 1/323 (2013.01); H01L 21/67017 (2013.01); H01L 21/67051 (2013.01); B05C 11/1013 (2013.01); B05C 11/1042 (2013.01); B08B 3/02 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A liquid storage unit comprising:
a tank housing defining a storing space therein;
a liquid outlet pipe penetrating into the tank housing and having an outlet formed thereon; and
a liquid inlet pipe penetrating into the tank housing and having an inlet formed thereon, and
wherein a first guide surface is provided between the outlet and the inlet,
wherein a part or all of the inlet at least partially overlaps the first guide surface when seen from above.