US 12,137,540 B2
Centrally anchored MEMS-based active cooling systems
Ananth Saran Yalamarthy, Stanford, CA (US); Suryaprakash Ganti, Los Altos, CA (US); Vikram Mukundan, San Ramon, CA (US); Seshagiri Rao Madhavapeddy, La Jolla, CA (US); Prabhu Sathyamurthy, San Jose, CA (US); and Narayana Prasad Rayapati, Mountain View, CA (US)
Assigned to Frore Systems Inc., San Jose, CA (US)
Filed by Frore Systems Inc., San Jose, CA (US)
Filed on Jul. 18, 2022, as Appl. No. 17/867,609.
Application 17/867,609 is a continuation of application No. 17/463,417, filed on Aug. 31, 2021, granted, now 11,432,433.
Application 17/463,417 is a continuation of application No. 16/915,912, filed on Jun. 29, 2020, granted, now 11,464,140.
Claims priority of provisional application 62/945,001, filed on Dec. 6, 2019.
Prior Publication US 2022/0354021 A1, Nov. 3, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. H05K 7/20 (2006.01); B81B 7/00 (2006.01)
CPC H05K 7/20509 (2013.01) [B81B 7/0093 (2013.01)] 23 Claims
OG exemplary drawing
 
1. A cooling system, comprising:
a top plate having at least one vent therein
a support structure;
a cooling element having a central axis and a perimeter, the cooling element being supported by the support structure at the central axis, at least a portion of the perimeter being unpinned from the support structure such that a first cantilevered portion of the cooling element disposed on a first side of the central axis and a second cantilevered portion disposed on a second side of the central axis opposite to the first side are configured to undergo vibrational motion; and
a bottom plate having a plurality of orifices therein, the cooling element being between the top plate and the bottom plate and being coupled to at least one of the top plate or the bottom plate by the support structure, the first cantilevered portion and the second cantilevered portion of the cooling element undergoing the vibrational motion when actuated to draw a fluid into the at least one vent and drive the fluid through the plurality of orifices.