CPC H03H 9/564 (2013.01) [H03H 9/02086 (2013.01); H03H 9/175 (2013.01); H03H 9/542 (2013.01); H03H 9/568 (2013.01)] | 15 Claims |
1. An RF filter device, comprising;
a resonator structure comprising a bulk acoustic wave (BAW) resonator, the resonator structure comprising an active structure and an acoustic mirror, wherein the active structure comprises a bottom electrode, a top electrode, and a piezoelectric material between the bottom electrode and the top electrode; and
a further electric circuit comprising at least a capacitance element, wherein the acoustic mirror is arranged on one or more layers between layers including the active structure and layers including the further electric circuit, wherein the acoustic mirror is configured to establish an electromagnetic shield.
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