US 12,136,910 B2
Acoustic wave resonator with patterned conductive layer for transverse mode suppression
Rei Goto, Osaka (JP)
Assigned to Skyworks Solutions, Inc., Irvine, CA (US)
Filed by Skyworks Solutions, Inc., Irvine, CA (US)
Filed on Jun. 4, 2020, as Appl. No. 16/892,743.
Claims priority of provisional application 62/858,905, filed on Jun. 7, 2019.
Prior Publication US 2020/0389151 A1, Dec. 10, 2020
Int. Cl. H03H 9/25 (2006.01); H03H 3/10 (2006.01); H03H 9/02 (2006.01); H03H 9/145 (2006.01); H03H 9/64 (2006.01); H04B 1/38 (2015.01)
CPC H03H 9/25 (2013.01) [H03H 3/10 (2013.01); H03H 9/02834 (2013.01); H03H 9/02992 (2013.01); H03H 9/145 (2013.01); H03H 9/6489 (2013.01); H04B 1/38 (2013.01)] 20 Claims
OG exemplary drawing
 
1. An acoustic wave resonator configured to generate a wavelength L, the acoustic wave resonator comprising:
a piezoelectric layer;
at least first and second interdigital transducer electrodes over the piezoelectric layer, each interdigital transducer electrode including a bus bar and fingers extending from the bus bar, the fingers each including an edge portion and a body portion, the fingers of the first interdigital transducer electrode spaced between with the fingers of the second interdigital transducer electrode;
a temperature compensation layer over the interdigital transducer electrode, the temperature compensation layer has a thickness from a lower surface to an upper surface opposite the lower surface, the lower surface being closer to the first and second interdigital transducer electrodes than the upper surface; and
a patterned conductive layer within the temperature compensation layer, the patterned conductive layer that does not overlap the fingers of the first and second interdigital transducer electrodes, the patterned conductive layer having a density that is at least as high as a density of a material of the first and second interdigital transducer electrodes that are in contact with the piezoelectric layer, the patterned conductive layer having an inner most edge and an outer most edge, a length between the inner most edge and the outer most edge being in a range from 0.5 L to 1.5 L, and the patterned conductive layer is spaced apart from the lower surface by a distance that is within 20% to 80% of the thickness of the temperature compensation layer.