US 12,136,909 B2
Vibrator element including base part, vibrating arm and weight provided to vibrating arm, vibrator device including vibrator element, and method of manufacturing vibrator element
Hideaki Kurita, Tokyo-to (JP)
Assigned to SEIKO EPSON CORPORATION, Tokyo (JP)
Filed by SEIKO EPSON CORPORATION, Tokyo (JP)
Filed on Feb. 18, 2021, as Appl. No. 17/178,733.
Claims priority of application No. 2020-027012 (JP), filed on Feb. 20, 2020.
Prior Publication US 2021/0265973 A1, Aug. 26, 2021
Int. Cl. H03H 9/19 (2006.01); H03H 3/02 (2006.01); H03H 9/05 (2006.01); H03H 9/10 (2006.01)
CPC H03H 9/19 (2013.01) [H03H 3/02 (2013.01); H03H 9/0557 (2013.01); H03H 9/1021 (2013.01); H03H 2003/022 (2013.01)] 11 Claims
OG exemplary drawing
 
1. A vibrator element comprising:
a base part;
a vibrating arm coupled to the base part; and
a weight provided to a principal surface of the vibrating arm, wherein
the weight is provided with at least one processing scar which is partially removed, and which is recessed in a thickness direction of the vibrating arm,
when an axis which overlaps a center in a width direction of the vibrating arm, and which extends along an extending direction of the vibrating arm is defined as a central axis, and an axis which overlaps a centroid of the vibrating arm, and which extends along the extending direction of the vibrating arm is defined as a centroid axis in a plan view of the principal surface, the at least one processing scar is formed in at least an area at the centroid axis side with respect to the central axis, and
an area of the at least one processing scar located at the centroid axis side with respect to the central axis is greater than an area of the at least one processing scar located at an opposite side to the centroid axis with respect to the central axis.