US 12,136,908 B2
Method of making an acoustic wave resonator with mass loading strip for suppression of hyperbolic mode
Yuya Hiramatsu, Neyagawa (JP); Rei Goto, Osaka (JP); and Yumi Torazawa, Takatsuki (JP)
Assigned to Skyworks Solutions, Inc., Irvine, CA (US)
Filed by Skyworks Solutions, Inc., Irvine, CA (US)
Filed on Dec. 5, 2023, as Appl. No. 18/529,276.
Application 18/529,276 is a continuation of application No. 17/075,039, filed on Oct. 20, 2020, granted, now 11,848,658.
Claims priority of provisional application 62/925,473, filed on Oct. 24, 2019.
Claims priority of provisional application 62/925,426, filed on Oct. 24, 2019.
Prior Publication US 2024/0186978 A1, Jun. 6, 2024
Int. Cl. H03H 9/02 (2006.01); H03F 3/24 (2006.01); H03H 9/145 (2006.01); H03H 9/25 (2006.01); H03H 9/64 (2006.01); H03H 9/72 (2006.01)
CPC H03H 9/02889 (2013.01) [H03F 3/245 (2013.01); H03H 9/02559 (2013.01); H03H 9/02834 (2013.01); H03H 9/02992 (2013.01); H03H 9/145 (2013.01); H03H 9/14541 (2013.01); H03H 9/1457 (2013.01); H03H 9/25 (2013.01); H03H 9/6406 (2013.01); H03H 9/6489 (2013.01); H03H 9/725 (2013.01); H03F 2200/451 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method of manufacturing a surface acoustic wave resonator, the method comprising:
forming or providing a surface acoustic wave resonator structure with a temperature compensation layer over an interdigital transducer electrode, the interdigital transducer electrode positioned on a piezoelectric layer and extending along a first length, the interdigital transducer electrode including one or more fingers extending from a bus bar to an edge portion; and
forming a mass loading strip that overlaps with the edge portion of the one or more fingers, the mass loading strip including a layer having a density that is at least as high as a density of a material of the interdigital transducer electrode that is in contact with the piezoelectric layer, the mass loading strip extending from a proximal end to a distal end along a second length shorter than the first length to thereby suppress a hyperbolic mode of the interdigital transducer electrode.