US 12,136,893 B2
Optical device having fixed and movable comb electrodes
Tatsuya Sugimoto, Hamamatsu (JP); Tomofumi Suzuki, Hamamatsu (JP); and Kyosuke Kotani, Hamamatsu (JP)
Assigned to HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
Appl. No. 16/625,687
Filed by HAMAMATSU PHOTONICS K.K., Hamamatsu (JP)
PCT Filed Jul. 6, 2018, PCT No. PCT/JP2018/025638
§ 371(c)(1), (2) Date Dec. 21, 2019,
PCT Pub. No. WO2019/009396, PCT Pub. Date Jan. 10, 2019.
Claims priority of application No. 2017-133093 (JP), filed on Jul. 6, 2017; application No. 2017-220237 (JP), filed on Nov. 15, 2017; application No. 2017-235021 (JP), filed on Dec. 7, 2017; application No. 2017-235022 (JP), filed on Dec. 7, 2017; application No. 2017-235025 (JP), filed on Dec. 7, 2017; and application No. 2018-080743 (JP), filed on Apr. 19, 2018.
Prior Publication US 2021/0130159 A1, May 6, 2021
Int. Cl. G02B 26/08 (2006.01); H02N 1/00 (2006.01)
CPC H02N 1/008 (2013.01) [G02B 26/0841 (2013.01)] 14 Claims
OG exemplary drawing
 
1. An optical device comprising:
a base that includes a main surface;
a movable unit that includes an optical function unit;
an elastic support unit that is connected between the base and the movable unit, and supports the movable unit so that the movable unit is movable along a predetermined direction perpendicular to the main surface;
a fixed comb electrode that is provided to the base and includes a plurality of fixed comb fingers; and
a movable comb electrode that is provided to at least one of the movable unit and the elastic support unit, and includes a plurality of movable comb fingers which are disposed alternately with the plurality of fixed comb fingers,
wherein at least one of the movable unit and the elastic support unit includes an electrode support portion that supports the movable comb electrode,
the plurality of movable comb fingers are directly connected to the electrode support portion,
the electrode support portion has a thickness in the predetermined direction larger than a thickness of the movable comb fingers at a connection part where proximate ends of the movable comb fingers are connected to the electrode support portion,
the electrode support portion includes a rib portion that is formed so that the thickness of the electrode support portion in the predetermined direction is larger than the thickness of the movable comb fingers in the predetermined direction,
the elastic support unit includes a lever and a torsion support portion connected between the lever and the movable unit,
the thickness of the electrode support portion in the predetermined direction is larger than a thickness of the torsion support portion in the predetermined direction, and
the base, the movable unit, and the elastic support unit are formed by a same common layer.