CPC H01L 33/505 (2013.01) [H01L 33/005 (2013.01); H01L 2933/0041 (2013.01)] | 17 Claims |
1. A preparation method of a light conversion device, comprising:
S1, disposing a plurality of pixel isolation structures on a first surface of a substrate layer, a plurality of sub-pixel regions isolated from each other being formed between the pixel isolation structures;
S2, performing a photolithography process n times on the substrate layer sequentially wherein each of the photolithography processes comprises:
forming a quantum dot adhesive layer and a photoresist layer on the substrate layer in sequence, the photoresist layer being located on the quantum dot adhesive layer far away from substrate layer, and a part of the quantum dot adhesive layer filling in bare sub-pixel regions:
exposing and developing the photoresist layer, and exposing at least one sub-pixel region;
in each of the photolithography processes, a number of bare sub-pixel regions after a mth time photolithography process being larger than a number of bare sub-pixel regions after (m+1)th time photolithography process, the bare sub-pixel regions after the mth time photolithography process being filled with a part of the quantum dot adhesive layer formed in the (m+1) time photolithography process, and orthographic projections of patterned quantum dot structures obtained in each of the photolithography processes being not overlapped in the sub-pixel regions,
curing the quantum dot adhesive layers which are remaining and the photoresist layers which are remaining to obtain the patterned quantum dot structures and cured photoresist layers, wherein n>m≥1, and n and m are all positive integers.
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