US 12,136,622 B2
Bidirectional electrostatic discharge (ESD) protection device
Tun-Chih Yang, New Taipei (TW); Zi-Ping Chen, New Taipei (TW); and Kun-Hsien Lin, Hsinchu (TW)
Assigned to Amazing Microelectronic Corp., New Taipei (TW)
Filed by AMAZING MICROELECTRONIC CORP., New Taipei (TW)
Filed on Jan. 3, 2022, as Appl. No. 17/646,735.
Prior Publication US 2023/0215864 A1, Jul. 6, 2023
Int. Cl. H01L 27/02 (2006.01)
CPC H01L 27/0292 (2013.01) [H01L 27/0255 (2013.01); H01L 27/0259 (2013.01)] 6 Claims
OG exemplary drawing
 
1. A bidirectional electrostatic discharge (ESD) protection device comprising:
a first transient voltage suppressor chip comprising:
a first diode with an anode thereof electrically connected to a first pin; and
a first PNP bipolar junction transistor with a collector thereof electrically connected to the first pin;
a second transient voltage suppressor chip comprising:
a second diode with an anode thereof electrically connected to a second pin; and
a second PNP bipolar junction transistor with a collector thereof electrically connected to the second pin, wherein a parasitic capacitance of the first PNP bipolar junction transistor or the second PNP bipolar junction transistor is larger than that of the first diode or the second diode;
a first conductive wire electrically connected between a cathode of the first diode and an emitter of the second PNP bipolar junction transistor;
a second conductive wire electrically connected between a cathode of the second diode and an emitter of the first PNP bipolar junction transistor;
a first lead frame serving as the first pin;
a first conductive material formed on the first lead frame and electrically connected to the first lead frame, wherein the first transient voltage suppressor chip is formed on the first conductive material;
a second lead frame serving as the second pin; and
a second conductive material formed on the second lead frame and electrically connected to the second lead frame, wherein the second transient voltage suppressor chip is formed on the second conductive material;
wherein the first diode and the first PNP bipolar junction transistor are implemented with a first P-type semiconductor substrate, a first N-type semiconductor epitaxial layer, a first N-type heavily-doped area, and a first P-type heavily-doped area, the first P-type semiconductor substrate is formed on and electrically connected to the first conductive material, the first N-type semiconductor epitaxial layer, formed on the first P-type semiconductor substrate, directly interfaces the first P-type semiconductor substrate, the first N-type heavily-doped area and the first P-type heavily-doped area are formed in the first N-type semiconductor epitaxial layer, the first N-type heavily-doped area is electrically connected to the first conductive wire, the first P-type heavily-doped area is electrically connected to the second conductive wire, the first transient voltage suppressor chip further comprises a first isolation structure, the first isolation structure is formed in the first N-type semiconductor epitaxial layer and formed between the first N-type heavily-doped area and the first P-type heavily-doped area, the first isolation structure touches the first P-type semiconductor substrate and separates the first N-type heavily-doped area from the first P-type heavily-doped area, and a height of the first isolation structure is equal to or larger than a thickness of the first N-type semiconductor epitaxial layer;
the first isolation structure surrounds the first N-type heavily-doped area and the first P-type heavily-doped area;
wherein the second diode and the second PNP bipolar junction transistor are implemented with a second P-type semiconductor substrate, a second N-type semiconductor epitaxial layer, a second N-type heavily-doped area, and a second P-type heavily-doped area, the second P-type semiconductor substrate is formed on and electrically connected to the second conductive material, the second N-type semiconductor epitaxial layer, formed on the second P-type semiconductor substrate, directly interfaces the second P-type semiconductor substrate, the second N-type heavily-doped area and the second P-type heavily-doped area are formed in the second N-type semiconductor epitaxial layer, the second N-type heavily-doped area is electrically connected to the second conductive wire, the second P-type heavily-doped area is electrically connected to the first conductive wire, the second transient voltage suppressor chip further comprises a second isolation structure, the second isolation structure is formed in the second N-type semiconductor epitaxial layer and formed between the second N-type heavily-doped area and the second P-type heavily-doped area, the second isolation structure touches the second P-type semiconductor substrate and separates the second N-type heavily-doped area from the second P-type heavily-doped area, and a height of the second isolation structure is equal to or larger than a thickness of the second N-type semiconductor epitaxial layer;
wherein the second isolation structure surrounds the second N-type heavily-doped area and the second P-type heavily-doped area.