CPC H01L 23/3121 (2013.01) [H01L 21/56 (2013.01); H01L 23/44 (2013.01); H05K 7/20772 (2013.01); H01L 23/29 (2013.01); H01L 23/291 (2013.01); H01L 23/293 (2013.01)] | 20 Claims |
1. A microelectronic module comprising:
a substrate;
thin film conductors formed on the substrate, wherein selected ones of the thin film conductors have a half-pitch in the range of 50 nm-2 μm;
a plurality of electronic components mounted on the substrate; and,
a water impermeable coating that covers the substrate and the plurality of electronic components.
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