US 12,136,555 B2
Material processing apparatus and operating method thereof
Shao-Chi Liu, Kaohsiung (TW)
Filed by Shao-Chi Liu, Kaohsiung (TW)
Filed on Mar. 16, 2021, as Appl. No. 17/202,362.
Claims priority of provisional application 63/056,725, filed on Jul. 27, 2020.
Claims priority of application No. 109130119 (TW), filed on Sep. 3, 2020.
Prior Publication US 2022/0028706 A1, Jan. 27, 2022
Int. Cl. H01L 21/67 (2006.01); B01J 3/04 (2006.01); G05D 16/00 (2006.01); G05D 23/19 (2006.01); G05D 27/02 (2006.01)
CPC H01L 21/67092 (2013.01) [G05D 16/028 (2019.01); G05D 23/1919 (2013.01); G05D 27/02 (2013.01); B01J 3/04 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A material processing apparatus, comprising:
a processing chamber, having an internal space;
an external pressure source, connected to the processing chamber for positive pressure action on the internal space;
a vacuum generator, connected to the processing chamber for negative pressure action on the internal space;
a temperature regulator, arranged in the processing chamber and configured to adjust a temperature in the internal space; and
a controller, configured to control the external pressure source to increase a pressure in the processing chamber from a normal pressure to a first predetermined pressure during initial heating within the processing chamber, and configured to control the vacuum generator to, after the pressure in the processing chamber rises to the first predetermined pressure, reduce the pressure in the processing chamber to a second predetermined pressure less than the normal pressure.