US 12,136,543 B2
Device for reducing misalignment between sputtering target and shield
Bo Liu, Spokane Valley, WA (US)
Assigned to Honeywell International Inc., Charlotte, NC (US)
Filed by Honeywell International Inc., Charlotte, NC (US)
Filed on May 11, 2023, as Appl. No. 18/195,985.
Claims priority of provisional application 63/390,052, filed on Jul. 18, 2022.
Prior Publication US 2024/0021422 A1, Jan. 18, 2024
Int. Cl. H01J 37/34 (2006.01); C23C 14/34 (2006.01)
CPC H01J 37/3435 (2013.01) [C23C 14/3407 (2013.01); H01J 37/3441 (2013.01)] 19 Claims
OG exemplary drawing
 
1. A spacing guide for use on a dark space shield of a sputtering chamber, the spacing guide comprising:
a horizontal body having a first end, a second end opposite the first end and a thickness, the horizontal body configured to rest on an end of the dark space shield;
a first leg extending laterally from the first end of the horizontal body and configured to rest against an outer surface of the dark space shield; and
a second leg extending laterally from the second end of the horizontal body and configured to rest against the inner surface of the shield, wherein the horizontal body, the first leg and the second leg are formed from an insulating material.