US 12,136,538 B2
Deposition chamber system diffuser with increased power efficiency
Changling Li, Santa Clara, CA (US); Lai Zhao, Campbell, CA (US); Gaku Furuta, Sunnyvale, CA (US); Soo Young Choi, Fremont, CA (US); Robin L. Tiner, Santa Cruz, CA (US); David Atchley, Livermore, CA (US); and Ganesh Babu Chandrasekaran, Santa Clara, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Oct. 19, 2021, as Appl. No. 17/505,194.
Prior Publication US 2023/0122134 A1, Apr. 20, 2023
Int. Cl. H01J 37/32 (2006.01); B23B 35/00 (2006.01); C23C 16/455 (2006.01); C23C 16/50 (2006.01)
CPC H01J 37/3244 (2013.01) [B23B 35/00 (2013.01); C23C 16/45565 (2013.01); C23C 16/50 (2013.01); H01J 2237/3321 (2013.01)] 15 Claims
OG exemplary drawing
 
1. A diffuser comprising:
a front-side gradient surface corresponding to a first concave surface formed from a diffuser block;
a back-side gradient surface corresponding to a second concave surface formed from the diffuser block; and
a plurality of opening structures formed from the front-side gradient surface to the back-side gradient surface, wherein each opening structure of the plurality of opening structures comprises:
a conical opening having a first end along the front-side gradient surface and a second end corresponding to an apex at an approximately same depth within the diffuser block, wherein the conical opening has a respective conical length defined by the front-side gradient surface; and
a cylindrical opening of approximately constant diameter formed from the approximately same depth to the back-side gradient surface, wherein the cylindrical opening has a respective cylindrical length defined by the back-side gradient surface;
wherein the plurality of opening structures is arranged in a plurality of rows comprising a first set of rows and a second set of rows alternately positioned along a length of the diffuser block, wherein the first set of rows comprises a first row having a first opening structure and a second opening structure separated by a first distance measured between centers of the first and second opening structures, wherein the second set of rows comprises a second row having a third opening structure separated from the first opening structure by a second distance measured between centers of the first and third opening structures, and wherein the diffuser has a hole density corresponding to the plurality of opening structures that ranges between about 0.8 hole per square centimeter to about 1.25 holes per square centimeter.