US 12,136,532 B2
Dual speed acquisition for drift corrected, fast, low dose, adaptive compositional charged particle imaging
Pavel Potocek, Eindhoven (NL); Remco Schoenmakers, Eindhoven (NL); Maurice Peemen, Eindhoven (NL); and Bert Henning Freitag, Eindhoven (NL)
Assigned to FEI Company, Hillsboro, OR (US)
Filed by FEI Company, Hillsboro, OR (US)
Filed on Oct. 12, 2022, as Appl. No. 17/964,411.
Application 17/964,411 is a continuation of application No. 17/214,747, filed on Mar. 26, 2021, granted, now 11,488,800.
Prior Publication US 2023/0035267 A1, Feb. 2, 2023
This patent is subject to a terminal disclaimer.
Int. Cl. H01J 37/28 (2006.01); G01N 23/20091 (2018.01); G01N 23/203 (2006.01); G01N 23/2254 (2018.01); H01J 37/147 (2006.01); H01J 37/244 (2006.01); H01J 37/26 (2006.01); H01J 37/302 (2006.01)
CPC H01J 37/1474 (2013.01) [G01N 23/20091 (2013.01); G01N 23/203 (2013.01); G01N 23/2254 (2013.01); H01J 37/244 (2013.01); H01J 37/265 (2013.01); H01J 37/28 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method for scanning a sample with a charged particle microscopy system, the system comprising:
identify a structure of interest in a first image of a surface region of a sample;
determining a scan strategy for the surface region, the scan strategy comprising:
a charged particle beam path;
a first beam dwell time associated with at least one region including the structure of interest in the first image, the first beam dwell time being sufficient to obtain statistically significant data from a first detector modality; and
at least a second beam dwell time associated with other regions of the first image to obtain data from a second detector modality, wherein the first beam dwell time is different than the second beam dwell time;
scanning the surface region of the sample according to the scan strategy;
obtaining, in a single pass and based on the surface region of the sample being scanned according to the scan strategy, first data from the first detector modality; and
obtaining, in the single pass and based on the surface region of the sample being scanned according to the scan strategy, second data from the first second detector modality.