US 12,136,507 B2
Hybrid resistors including resistor bodies with different drift effects
Qiang Bai, Singapore (SG); Kumar Singh Sudhish, Singapore (SG); Biying Guan, Singapore (SG); Venkataramani Chandrasekar, Singapore (SG); Karan Khullar, Dresden (DE); and Lingfen Kong, Singapore (SG)
Assigned to GlobalFoundries Singapore Pte. Ltd., Singapore (SG)
Filed by GlobalFoundries Singapore Pte. Ltd., Singapore (SG)
Filed on Mar. 30, 2022, as Appl. No. 17/708,094.
Prior Publication US 2023/0317324 A1, Oct. 5, 2023
Int. Cl. H01C 17/00 (2006.01); H01L 23/522 (2006.01); H01L 49/02 (2006.01)
CPC H01C 17/006 (2013.01) [H01L 23/5228 (2013.01); H01L 28/24 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A structure for a resistor, the structure comprising:
a first resistor body comprising a first material having a first drift effect; and
a second resistor body coupled to the first resistor body, the second resistor body comprising a second material having a second drift effect that is different from the first drift effect,
wherein the first material is tantalum nitride and the first drift effect is positive, and the second material is tantalum nitride and the second drift effect is negative.