US 12,136,225 B2
Clog detection via image analytics
Yash Chhabra, Bangalore (IN); Abyaya Dhar, Bangalore (IN); Boon Sen Chan, Singapore (SG); Yenwei Hung, Taoyuan (TW); Sidda Reddy Kurakula, Bengaluru (IN); Chandrasekhar Roy, Bangalore (IN); and Chih Chuan Wang, Hsinchu (TW)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Sep. 9, 2022, as Appl. No. 17/941,914.
Prior Publication US 2024/0087135 A1, Mar. 14, 2024
Int. Cl. G06T 7/00 (2017.01); G06T 7/194 (2017.01)
CPC G06T 7/194 (2017.01) [G06T 7/0004 (2013.01); G06T 2207/20081 (2013.01); G06T 2207/30164 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method comprising:
identifying an image of a substrate processing equipment part that forms a plurality of holes;
determining, by a processing device based on the image, a clockwise holes spiral and an anti-clockwise holes spiral of the plurality of holes, a corresponding neighboring angular distance of each of the plurality of holes, and a corresponding area of each of the plurality of holes; and
identifying, by the processing device, a first subset of the plurality of holes in at least one of the clockwise holes spiral or the anti-clockwise holes spiral that are at least partially clogged based on at least one of the corresponding neighboring angular distance or the corresponding area of each of the plurality of holes, wherein a corrective action associated with the substrate processing equipment part is to be performed based on the first subset of the plurality of holes that are at least partially clogged.