US 12,135,529 B2
Post preventative maintenance chamber condition monitoring and simulation
Jeong Jin Hong, Yongin (KR); and Mihyun Jang, Seoul (KR)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Dec. 14, 2021, as Appl. No. 17/551,180.
Prior Publication US 2023/0185255 A1, Jun. 15, 2023
Int. Cl. G05B 13/04 (2006.01); G05B 13/02 (2006.01); G06F 18/214 (2023.01); G06N 5/01 (2023.01); H01L 21/67 (2006.01)
CPC G05B 13/048 (2013.01) [G05B 13/0265 (2013.01); G06F 18/214 (2023.01); G06N 5/01 (2023.01); H01L 21/67207 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A method, comprising:
receiving, by a processing device, sensor data indicating a state of an environment of one or more manufacturing equipment associated with processing a series of substrates according to a substrate processing procedure, the series of substrates processed subsequent to a preventive maintenance procedure performed on the one or more manufacturing equipment;
determining, by the processing device, a first set of values based on the sensor data, the first set of values each associated with one of the series of substrates and indicating a likelihood an associated substrate comprises a first process result that meets a threshold condition of the substrate processing procedure;
predicting, by the processing device, a first test result based on the first set of values, the first test result indicating a likelihood a first substrate processed subsequent to processing the series of substrates comprises a second process result that meets the threshold condition; and
altering one or more settings of an operation of the one or more manufacturing equipment based on the first test result, wherein the altered one or more settings control a state of the environment of the one or more manufacturing equipment to a target state.