US 12,135,437 B2
MEMS actuator system
Matthew Ng, Rosemead, CA (US); Xiaolei Liu, South Pasadena, CA (US); and Guiqin Wang, Arcadia, CA (US)
Assigned to MEMS DRIVE (NANJING) CO., LTD., Nanjing (CN)
Filed by MEMS Drive (Nanjing) Co., Ltd., Nanjing (CN)
Filed on Sep. 18, 2020, as Appl. No. 17/025,147.
Claims priority of provisional application 62/903,207, filed on Sep. 20, 2019.
Prior Publication US 2021/0088804 A1, Mar. 25, 2021
Int. Cl. G02B 27/64 (2006.01); H04N 23/68 (2023.01); B81B 3/00 (2006.01); H02K 41/035 (2006.01); H02N 1/00 (2006.01); H02N 2/02 (2006.01)
CPC G02B 27/646 (2013.01) [H04N 23/687 (2023.01); B81B 3/0062 (2013.01); B81B 2203/055 (2013.01); H02K 41/0356 (2013.01); H02K 2201/18 (2013.01); H02N 1/008 (2013.01); H02N 2/028 (2013.01)] 16 Claims
OG exemplary drawing
 
1. A multi-axis MEMS assembly configured to provide multi-axis movement, the multi-axis MEMS assembly comprising:
a first in-plane MEMS actuator configured to enable movement along at least an X-axis; and
a second in-plane MEMS actuator configured to enable movement along at least a Y-axis;
wherein the first in-plane MEMS actuator is interconnected with the second in-plane MEMS actuator in a Z-axis by coupling moveable portions and fixed portions contained within the first in-plane MEMS actuator and the second in-plane MEMS actuator.