US 12,135,415 B2
Electrostatic actuator with 4-bit digital electrode
William Craig McDonald, Allen, TX (US); James Norman Hall, Parker, TX (US); Kelly Jay Taylor, Allen, TX (US); and Song Zheng, Fairview, TX (US)
Assigned to TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US)
Filed by TEXAS INSTRUMENTS INCORPORATED, Dallas, TX (US)
Filed on Aug. 10, 2021, as Appl. No. 17/398,907.
Claims priority of provisional application 63/152,179, filed on Feb. 22, 2021.
Prior Publication US 2022/0269067 A1, Aug. 25, 2022
Int. Cl. G02B 26/08 (2006.01); G02B 7/182 (2021.01); H02N 1/00 (2006.01)
CPC G02B 26/0816 (2013.01) [H02N 1/006 (2013.01)] 21 Claims
OG exemplary drawing
 
1. A device comprising:
a hinge structure;
a mirror coupled to the hinge structure; and
an electrode structure under the hinge structure, wherein the electrode structure comprises:
a first electrode;
a second electrode around the first electrode;
a third electrode around the second electrode;
a fourth electrode around the third electrode; and
a fifth electrode around the fourth electrode, the fifth electrode electrically coupled to the hinge structure.