US 12,135,338 B2
Probe head and probe card comprising same
Bum Mo Ahn, Gyeonggi-do (KR); Sung Hyun Byun, Gyeonggi-do (KR); and Dong Hyeok Seo, Chungcheongnam-do (KR)
Assigned to POINT ENGINEERING CO., LTD., Chungcheongnam-do (KR)
Appl. No. 17/912,518
Filed by POINT ENGINEERING CO., LTD., Chungcheongnam-do (KR)
PCT Filed Mar. 23, 2021, PCT No. PCT/KR2021/003564
§ 371(c)(1), (2) Date Sep. 18, 2022,
PCT Pub. No. WO2021/194213, PCT Pub. Date Sep. 30, 2021.
Claims priority of application No. 10-2020-0036448 (KR), filed on Mar. 25, 2020.
Prior Publication US 2023/0152350 A1, May 18, 2023
Int. Cl. G01R 1/073 (2006.01); G01R 31/28 (2006.01)
CPC G01R 1/07378 (2013.01) [G01R 1/07342 (2013.01); G01R 31/2886 (2013.01)] 4 Claims
OG exemplary drawing
 
1. A probe head for guiding a probe, the probe head comprising:
a guide plate that has a guide hole into which the probe is inserted and is made of a photoresist capable of lithography,
wherein the photoresist has a light-transmitting property, and
wherein the photoresist is subjected to heat treatment, so that the heat-treated photoresist has a hardness increased compared to before the heat treatment.