US 12,135,335 B2
Semi-automatic prober
Edward McCloud, Castro Valley, CA (US); and Jacob Herschmann, Palo Alto, CA (US)
Assigned to QualiTau, Inc., Santa Clara, CA (US)
Filed by QualiTau, Inc., Santa Clara, CA (US)
Filed on Sep. 1, 2021, as Appl. No. 17/464,307.
Application 17/464,307 is a division of application No. 14/976,810, filed on Dec. 21, 2015, granted, now 11,175,309.
Claims priority of provisional application 62/096,693, filed on Dec. 24, 2014.
Prior Publication US 2021/0396785 A1, Dec. 23, 2021
Int. Cl. G01R 1/04 (2006.01); G01R 1/067 (2006.01); G01R 1/073 (2006.01); G01R 31/28 (2006.01)
CPC G01R 1/0408 (2013.01) [G01R 1/06705 (2013.01); G01R 1/07342 (2013.01); G01R 31/2865 (2013.01); G01R 31/2886 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A front loading wafer probe station having a testing chamber, comprising:
a single segment pivoting arm having a first end and a second end, wherein the first end is configured to rotate about a pivot point attached to a platform of the wafer probe station; and
two wafer supporting segments, wherein each wafer supporting segment is rotatably mounted on the second end of the pivoting arm, wherein the wafer supporting segments are movable directly between a position inside the chamber and a position at least partially outside the wafer probe station, and wherein both wafer supporting segments are configured to support, from below, a wafer loaded thereon, wherein the wafer is loaded onto top surfaces of both wafer supporting segments when the wafer supporting segments are at least partially outside the wafer probe station.