CPC G01N 3/20 (2013.01) [G01B 11/165 (2013.01); G01N 3/068 (2013.01); G01N 2203/0075 (2013.01); G01N 2203/0647 (2013.01)] | 8 Claims |
1. A method of displaying stress distribution on a sample surface while repeatedly loading and unloading the sample, comprising:
capturing images of a sample surface before loading, during the loading, and after unloading;
measuring a first strain amount for each pixel position based on correlation between the image before the loading and the image after the unloading;
measuring a second strain amount for each pixel position based on correlation between the image before the loading and the image during the loading;
calculating stress for each pixel position based on the difference between the first strain amount and the second strain amount;
displaying the distribution of the calculated stress at each pixel position;
calculating the difference in stress displayed at the same pixel position between stress distribution obtained by the last loading and unloading and stress distribution obtained by the current loading and unloading, and
displaying a pixel position at which the difference is equal to or greater than a predetermined threshold value.
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