US 12,135,299 B2
X-ray fluorescence analyzer
Takuro Izumi, Kyoto (JP); and Tetsuya Yoneda, Kyoto (JP)
Assigned to SHIMADZU CORPORATION, Kyoto (JP)
Appl. No. 17/794,855
Filed by Shimadzu Corporation, Kyoto (JP)
PCT Filed Oct. 15, 2020, PCT No. PCT/JP2020/038875
§ 371(c)(1), (2) Date Jul. 22, 2022,
PCT Pub. No. WO2021/152928, PCT Pub. Date Aug. 5, 2021.
Claims priority of application No. 2020-010907 (JP), filed on Jan. 27, 2020.
Prior Publication US 2023/0057233 A1, Feb. 23, 2023
Int. Cl. G01N 23/20008 (2018.01); G01N 23/207 (2018.01); G01N 23/2209 (2018.01); G01N 23/223 (2006.01)
CPC G01N 23/20008 (2013.01) [G01N 23/2076 (2013.01); G01N 23/2209 (2018.02); G01N 23/223 (2013.01); G01N 2223/076 (2013.01); G01N 2223/079 (2013.01); G01N 2223/1016 (2013.01); G01N 2223/3103 (2013.01); G01N 2223/3106 (2013.01)] 3 Claims
OG exemplary drawing
 
1. An X-ray fluorescence analyzer comprising:
an analyzing crystal configured to spectrally disperse X-ray fluorescence emitted from a sample;
an X-ray detector configured to detect the X-ray fluorescence spectrally dispersed by the analyzing crystal;
a warm air generator configured to generate warm air to maintain a temperature of the analyzing crystal at a target temperature; and
a Peltier element configured to cool the X-ray detector such that a temperature of the X-ray detector is set to a temperature lower than the target temperature,
wherein the Peltier element includes:
a heat absorption portion configured to absorb heat of the X-ray detector to cool the X-ray detector; and
a heat dissipation portion configured to dissipate heat of the heat absorption portion to an outside, the heat dissipation portion being provided on a side farther from the X-ray detector than the heat absorption portion,
wherein the X-ray fluorescence analyzer further comprises a heat sink in contact with the heat dissipation portion of the Peltier element, and
wherein the warm air generator is arranged such that the warm air sent from the warm air generator is brought into contact with the heat sink.