US 12,135,294 B2
Imaging device, inspection apparatus and inspection method
Tatsuya Shirasaka, Kanagawa (JP); Takayuki Tochigi, Kanagawa (JP); and Osamu Hatano, Kanagawa (JP)
Assigned to TOYO SEIKAN CO., LTD., Tokyo (JP)
Filed by TOYO SEIKAN CO., LTD., Tokyo (JP)
Filed on Apr. 22, 2022, as Appl. No. 17/727,191.
Application 17/727,191 is a continuation of application No. PCT/JP2020/042141, filed on Nov. 11, 2020.
Claims priority of application No. 2019-206855 (JP), filed on Nov. 15, 2019.
Prior Publication US 2022/0244192 A1, Aug. 4, 2022
Int. Cl. G01N 21/88 (2006.01); G01N 21/25 (2006.01)
CPC G01N 21/8851 (2013.01) [G01N 21/251 (2013.01); G01N 2021/8812 (2013.01)] 22 Claims
OG exemplary drawing
 
1. An imaging device configured to image a printed state of a target surface of a target object for inspection, the imaging device comprising:
a first light source;
a diffuser including an inner periphery surface covered with a diffuse reflection material, and configured to diffusely reflect light emitted from the first light source and emit diffusely reflected light to the target surface;
a line sensor configured to receive light resulting from reflecting the diffusely reflected light from the target surface; and
a movement mechanism configured to move the target surface relative to the line sensor in a direction intersecting an array direction of light-receiving elements of the line sensor, wherein:
at least part of the target surface is a curved surface being convex to the diffuser and having a center of curvature on an axis along a longitudinal direction of the diffuser; and
the movement mechanism rotates the target object around the center of curvature of the target surface as a rotation axis.