CPC G01L 1/167 (2013.01) [G01L 1/106 (2013.01); B25J 13/084 (2013.01)] | 7 Claims |
1. A piezoelectric element device, comprising:
a substrate including a plurality of vibrating portions having a first vibrating portion and a second vibrating portion;
a piezoelectric element group in which a plurality of piezoelectric elements having a first piezoelectric element and a second piezoelectric element provided in the plurality of vibrating portions are coupled in parallel to each other;
a plurality of load detectors having a first load detector including the first vibrating portion and the first piezoelectric element provided in the first vibrating portion and a second load detector including the second vibrating portion and the second piezoelectric element provided in the second vibrating portion; and
a resin layer covering the piezoelectric element group, wherein
the first load detector resonates at a first resonance frequency,
the second load detector resonates at a second resonance frequency,
the first resonance frequency and the second resonance frequency are different from each other,
the first resonance frequency changes in accordance with a load applied to the first load detector via the resin layer,
the second resonance frequency changes in accordance with a load applied to the second load detector via the resin layer, and
a first resonance frequency change range, which is a changeable range of the first resonance frequency, and a second resonance frequency change range, which is a changeable range of the second resonance frequency, do not overlap each other.
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