US 12,135,250 B2
Piezoelectric sensor and manufacturing method of piezoelectric sensor
Hiroumi Kinjo, Tokyo (JP)
Assigned to Japan Display Inc., Tokyo (JP)
Filed by Japan Display Inc., Tokyo (JP)
Filed on Mar. 9, 2022, as Appl. No. 17/690,301.
Application 17/690,301 is a continuation of application No. PCT/JP2020/028309, filed on Jul. 21, 2020.
Claims priority of application No. 2019-167727 (JP), filed on Sep. 13, 2019.
Prior Publication US 2022/0196489 A1, Jun. 23, 2022
Int. Cl. G01L 1/16 (2006.01); H10N 30/00 (2023.01); H10N 30/06 (2023.01); H10N 30/079 (2023.01); H10N 30/098 (2023.01); H10N 30/30 (2023.01); H10N 30/857 (2023.01); H10N 30/87 (2023.01)
CPC G01L 1/16 (2013.01) [H10N 30/06 (2023.02); H10N 30/079 (2023.02); H10N 30/098 (2023.02); H10N 30/302 (2023.02); H10N 30/708 (2024.05); H10N 30/857 (2023.02); H10N 30/87 (2023.02)] 8 Claims
OG exemplary drawing
 
1. A piezoelectric sensor, comprising:
a stress applying layer in which a plurality of stress applying grooves extending in parallel with a first direction are formed in a predetermined region on a whole surface;
a piezoelectric layer that is layered on the stress applying layer and formed from a polymer piezoelectric material containing an optical active polymer; and
a template layer that is disposed opposite the piezoelectric layer in relation to the stress applying layer,
wherein
the stress applying layer is an electrode layer,
the template layer has a primary groove formed on the template layers,
the electrode layer has a secondary groove that is recessed corresponding to the primary groove and formed on the electrode layer,
the secondary groove is in contact with the piezoelectric layer,
the template layer has a plurality of regions each being formed in a rectangular shape in plan view, and
the first direction is inclined at an angle of 45 degrees with respect to each side of the regions.