US 12,135,204 B2
Apparatus and method for determining three-dimensional shape of object
Chan Kwon Lee, Ansan-si (KR); Moon Young Jeon, Seongnam-si (KR); Deok Hwa Hong, Gwangmyeong-si (KR); and Joong Ki Jeong, Gwangmyeong-si (KR)
Assigned to KOH YOUNG TECHNOLOGY INC., Seoul (KR)
Appl. No. 17/623,508
Filed by KOH YOUNG TECHNOLOGY INC., Seoul (KR)
PCT Filed Jun. 29, 2020, PCT No. PCT/KR2020/008461
§ 371(c)(1), (2) Date Dec. 28, 2021,
PCT Pub. No. WO2020/263054, PCT Pub. Date Dec. 30, 2020.
Claims priority of application No. 10-2019-0077638 (KR), filed on Jun. 28, 2019.
Prior Publication US 2022/0364852 A1, Nov. 17, 2022
This patent is subject to a terminal disclaimer.
Int. Cl. G01B 11/24 (2006.01); G01B 11/25 (2006.01); G01B 11/27 (2006.01); H01L 21/66 (2006.01)
CPC G01B 11/254 (2013.01) [G01B 11/2433 (2013.01); G01B 11/2509 (2013.01); G01B 11/2527 (2013.01); G01B 11/272 (2013.01); H01L 22/12 (2013.01)] 14 Claims
OG exemplary drawing
 
1. An apparatus for determining a first three-dimensional shape of an object located on a reference plane, comprising:
one or more first light sources configured to irradiate one or more first pattern lights to the object;
a second light source configured to sequentially irradiate one or more second pattern lights having one phase range;
a beam splitter and one or more lenses configured to change optical paths of the one or more second pattern lights so that a beam of light corresponding to a respective phase of the phase range spreads, and lights corresponding to an average light amount of the one or more second pattern lights arrive at each point of a partial region of an upper surface of the object;
an image sensor configured to capture one or more first reflected lights generated by reflecting the one or more first pattern lights from the object and one or more second reflected lights generated by reflecting the one or more second pattern lights from the partial region; and
a processor that is electrically connected to the one or more first light sources, the second light source and the image sensor, and that is configured to:
determine a second three-dimensional shape of the object based on each of phase changes of the one or more first reflected lights from the one or more first pattern lights;
determine an angle of the upper surface of the object with respect to the reference plane based on each light amount value of the one or more second reflected lights; and
determine the first three-dimensional shape of the object by correcting the upper surface of the object indicated by the second three-dimensional shape based on the angle of the upper surface of the object.