US 12,135,045 B2
Gas circulation apparatus, gas circulation method, pneumatic apparatus, and semiconductor device
Qing Huang, Hefei (CN)
Assigned to CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed by CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei (CN)
Filed on Nov. 9, 2021, as Appl. No. 17/454,240.
Application 17/454,240 is a continuation of application No. PCT/CN2021/112840, filed on Aug. 16, 2021.
Claims priority of application No. 202110910384.0 (CN), filed on Aug. 9, 2021.
Prior Publication US 2023/0041577 A1, Feb. 9, 2023
Int. Cl. F15B 11/064 (2006.01); F15B 13/04 (2006.01); H01L 21/67 (2006.01); G05D 7/06 (2006.01)
CPC F15B 11/064 (2013.01) [H01L 21/67017 (2013.01); F15B 13/0402 (2013.01); F15B 2211/30565 (2013.01); F15B 2211/7053 (2013.01); F15B 2211/8855 (2013.01); G05D 7/0635 (2013.01); Y10T 137/2678 (2015.04); Y10T 137/86839 (2015.04)] 20 Claims
OG exemplary drawing
 
1. A gas circulation apparatus, applied to a pneumatic apparatus comprising a solenoid valve apparatus and a cylinder apparatus, wherein the gas circulation apparatus is connected in series between the solenoid valve apparatus and the cylinder apparatus; the gas circulation apparatus comprises a valve core structure, a first circulation cavity, and a second circulation cavity; and
wherein the valve core structure is configured to move in a first direction, so that a compressed gas discharged from a first cylinder cavity of the cylinder apparatus and then passing through the solenoid valve apparatus is collected and stored by the first circulation cavity, and a second cylinder cavity of the cylinder apparatus is charged with a compressed gas stored in the second circulation cavity together with a compressed gas supplied from the solenoid valve apparatus.