CPC F04B 43/046 (2013.01) | 24 Claims |
1. A fluid control apparatus, comprising:
a first space having an inlet and an outlet,
two fiat plate members facing each other via the first space, at least one of the fiat plate members being an elastic body having flexibility,
a drive mechanism that bends the elastic body,
a second space that adjoins the first space, communicates with the first space via the inlet, and has a suction port,
a first check valve that allows fluid to flow from the suction port to the first space via the inlet, and
a third space that adjoins the first space, communicates with the first space via the outlet, and has a discharge port,
wherein at least one of the suction port and the discharge port is positioned on an extension surface of at least one of the two flat plate members,
wherein a flow path is connected from the second space to the first space via the inlet and from the first space to the third space via the outlet,
wherein the second space has cross-sectional areas of the flow path continuously changing from the suction port to the inlet, and
wherein the third space has cross-sectional areas of the flow path continuously changing from the outlet to the discharge port.
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