US 12,134,835 B2
Quartz susceptor for accurate non-contact temperature measurement
Kim Ramkumar Vellore, San Jose, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Sep. 1, 2021, as Appl. No. 17/464,657.
Prior Publication US 2023/0066087 A1, Mar. 2, 2023
Int. Cl. C30B 25/12 (2006.01); C30B 25/10 (2006.01); G01J 5/08 (2022.01); H01L 21/687 (2006.01)
CPC C30B 25/12 (2013.01) [C30B 25/10 (2013.01); G01J 5/08 (2013.01); H01L 21/68757 (2013.01)] 20 Claims
OG exemplary drawing
 
10. A processing chamber comprising:
a chamber body assembly;
a lower window;
an upper window, wherein the lower window and the upper window are on opposite sides of an internal chamber volume;
a plurality of temperature control elements configured to heat a substrate disposed in the internal chamber volume;
a susceptor assembly disposed in the internal chamber volume; and
a lower pyrometer disposed outside the internal chamber volume and configured detect a first temperature of the susceptor assembly through the lower window; and
an upper pyrometer disposed outside the internal chamber volume and configured to detect a second temperature of the susceptor assembly through the upper window, wherein the susceptor assembly comprises:
a shaft;
a substrate support disposed on the shaft, the substrate support comprising:
a body having a top surface configured to support a substrate thereon, a bottom surface opposite the top surface, an upper portion disposed at the top surface, and a lower portion disposed at the bottom surface, wherein the body comprising:
an infrared (IR) transparent material; and
an infrared (IR) blocking material encased by the upper portion and the lower portion, wherein the IR blocking material is optically opaque at infrared (IR) wavelengths, the IR transparent material disposed below the IR blocking material in the lower portion and is optically transparent at IR wavelengths.