US 12,134,834 B2
Composition for copper bump electrodeposition comprising a polyaminoamide type leveling agent
Marco Arnold, Ludwigshafen am Rhein (DE); Alexander Fluegel, Ludwigshafen am Rhein (DE); Charlotte Emnet, Ludwigshafen am Rhein (DE); and Nadine Engelhardt, Ludwigshafen am Rhein (DE)
Assigned to BASF SE, Ludwigshafen am Rhein (DE)
Appl. No. 17/995,186
Filed by BASF SE, Ludwigshafen am Rhein (DE)
PCT Filed Mar. 24, 2021, PCT No. PCT/EP2021/057522
§ 371(c)(1), (2) Date Sep. 30, 2022,
PCT Pub. No. WO2021/197950, PCT Pub. Date Oct. 7, 2021.
Claims priority of application No. 20168057 (EP), filed on Apr. 3, 2020.
Prior Publication US 2023/0142238 A1, May 11, 2023
Int. Cl. C25D 3/38 (2006.01)
CPC C25D 3/38 (2013.01) 20 Claims
 
1. A composition comprising copper ions, an acid, and at least one polyaminoamide comprising a group of formula L1
[A-B-A′-Z]n[Y—Z]m  (L1)
wherein
B is a diacid fragment of formula L2

OG Complex Work Unit Chemistry
A, A′ are amine fragments independently selected from the group consisting of formula L3a

OG Complex Work Unit Chemistry
and formula L3b

OG Complex Work Unit Chemistry
DL1 is selected from the group consisting of
(a) a chemical bond and
(b) a divalent group selected from the group consisting of
(i) C1-C20-alkanediyl which may optionally be interrupted by a double bond, an imino group or is optionally, completely or partially, a constituent of one or more saturated, unsaturated or aromatic 5- to 10-membered rings, and
(ii) an ether or polyether group of formula L2a
-(DL10-O-]oDL10-  (L2a);
DL2 is a divalent group selected from the group consisting of
(a) a linear or branched C1 to C10 alkanediyl, which may optionally be interrupted by NRL10 or O, or substituted by one or more groups NRL10RL11 or ORL10, and
(b) -DL11-ArL11-DL11-;
DL10 is C1-C6-alkanediyl;
DL11 is a C1-C6-alkanediyl;
ArL11 is a C6 to C10 aromatic moiety;
DL21, DL22 are independently selected from the group consisting of a linear or branched C1 to C6 alkanediyl;
DL23 is a C1 to C6 alkanediyl;
RL1, RL2 are independently selected from the group consisting of C1 to C6 alkyls;
RL3 is selected from the group consisting of H and C1 to C6 alkyls;
Y is a co-monomer fragment;
Z is a divalent coupling fragment of formula L4

OG Complex Work Unit Chemistry
ZL1 is selected from the group consisting of
(a) a linear or branched C1 to C12 alkanediyl, which may be interrupted by one or more O atoms, and
(b) a divalent group -DL11-ArL11-DL11-;
ZL2, ZL3 are independently selected from the group consisting of a chemical bond and hydroxyethanediyl;
n is an integer of from 1 to 400;
m is 0 or an integer of from 1 to 400;
o is an integer of from 1 to 100; and
p is 0 or 1.