US 12,134,821 B2
Multilayer encapsulation thin-film
Choelmin Jang, Yongin-si (KR); Sungmin Cho, Gunpo-si (KR); Ho Kyoon Chung, Yongin-si (KR); Heeyeop Chae, Anyang-si (KR); Sang Joon Seo, Seoul (KR); and Seung Woo Seo, Hwaseong-si (KR)
Assigned to Research & Business Foundation Sungkyunkwan University, Suwon-si (KR); and Samsung Display Co., Ltd., Yongin-si (KR)
Filed by Research & Business Foundation Sungkyunkwan University, Suwon-si (KR); and Samsung Display Co., Ltd., Yongin-si (KR)
Filed on Oct. 1, 2021, as Appl. No. 17/491,554.
Application 17/491,554 is a division of application No. 16/654,096, filed on Oct. 16, 2019, abandoned.
Application 16/654,096 is a division of application No. 14/260,815, filed on Apr. 24, 2014, abandoned.
Claims priority of application No. 10-2013-0047933 (KR), filed on Apr. 30, 2013; and application No. 10-2014-0015730 (KR), filed on Feb. 11, 2014.
Prior Publication US 2022/0018022 A1, Jan. 20, 2022
Int. Cl. C23C 16/44 (2006.01); C23C 16/455 (2006.01); C23C 16/54 (2006.01); C23C 28/00 (2006.01); H10K 30/88 (2023.01); H10K 50/844 (2023.01)
CPC C23C 16/44 (2013.01) [C23C 16/45519 (2013.01); C23C 16/45548 (2013.01); C23C 16/54 (2013.01); C23C 28/00 (2013.01); C23C 28/42 (2013.01); H10K 30/88 (2023.02); H10K 50/8445 (2023.02); Y02E 10/549 (2013.01); Y10T 428/269 (2015.01); Y10T 428/31663 (2015.04); Y10T 428/31855 (2015.04); Y10T 428/31935 (2015.04)] 7 Claims
OG exemplary drawing
 
1. A method of preparing a multilayer encapsulation thin-film, the method comprising:
forming an inorganic thin film comprising a metal oxide on a substrate; and
forming an organic thin film comprising a polymer on the inorganic thin film using an organic thin film deposition unit comprising a monomer injection unit and UV-curing units,
wherein the forming of the inorganic thin film and the forming of the organic thin film are alternately carried out, so that separate inorganic thin film and organic thin film are alternately stacked on top of each other,
wherein the forming of each organic thin film in the alternate stack comprises:
coating an acrylic monomer on each inorganic thin film; and
UV-curing the coated acrylic monomer using a first UV-curing unit when the substrate is moving in one direction and a second UV-curing unit when the substrate is moving in the opposite direction, and
wherein the first and second UV-curing units are disposed one adjacent each side of both sides of the monomer injection unit.