US 12,134,820 B2
Process for making a fabric based substrate bearing a carbon based coating
Grégory Arnoult, Noville-les-Bois (BE)
Assigned to AGC GLASS EUROPE, Louvain-la-Neuve (BE)
Appl. No. 17/761,846
Filed by AGC GLASS EUROPE, Louvain-la-neuve (BE)
PCT Filed Sep. 23, 2020, PCT No. PCT/EP2020/076540
§ 371(c)(1), (2) Date Mar. 18, 2022,
PCT Pub. No. WO2021/058547, PCT Pub. Date Apr. 1, 2021.
Claims priority of application No. 19199069 (EP), filed on Sep. 23, 2019.
Prior Publication US 2022/0275503 A1, Sep. 1, 2022
Int. Cl. C23C 16/26 (2006.01); C23C 16/04 (2006.01); C23C 16/455 (2006.01); C23C 16/50 (2006.01); C23C 16/52 (2006.01); D06M 10/06 (2006.01); D06M 11/74 (2006.01); D06M 101/32 (2006.01); D06M 101/34 (2006.01)
CPC C23C 16/26 (2013.01) [C23C 16/045 (2013.01); C23C 16/45517 (2013.01); C23C 16/50 (2013.01); C23C 16/52 (2013.01); D06M 10/06 (2013.01); D06M 11/74 (2013.01); D06M 2101/32 (2013.01); D06M 2101/34 (2013.01)] 16 Claims
 
1. A process for the production of carbon based coatings on fabric substrates comprising:
providing a fabric substrate;
providing a first linear hollow-cathode plasma source comprising at least one pair of hollow-cathode plasma generating electrodes connected to an AC, DC or pulsed DC generator, for the deposition of the carbon based coating on the fabric substrate;
injecting a first plasma generating gas in the first plasma source's electrodes at a flow rate of between 1500 and 4500 sccm per linear meter of plasma of the first plasma source;
applying a first electrical power to the first plasma source, so that a first power density of the plasma is between 4 kW and 15 KW per linear meter of the plasma of the first plasma source;
injecting a carbon precursor gas at a flow rate of between 100 and 500 sccm per linear meter of the plasma of the first plasma source, the carbon precursor gas being injected into the plasma at least between the electrodes of each electrode pair of the first plasma source;
depositing the carbon based coating directly on the fabric substrate's surface by exposing the fabric substrate to the plasma of the first plasma source,
providing a second linear hollow-cathode plasma source comprising at least one pair of hollow-cathode plasma generating electrodes connected to an AC, DC or pulsed DC generator, for surface activation of the fabric substrate;
injecting a second plasma generating gas in the second plasma source's electrodes at a flow rate of between 1500 and 4500 sccm per linear meter of the second plasma source;
supplying a second electrical power to the second plasma source, so that a second power density of plasma of the second plasma source is between 10 kW and 20 kW per linear meter of the plasma of the second plasma source, and;
activating the fabric substrate's surface by exposing the fabric substrate to the plasma of the second plasma source, before depositing the carbon based coating on the fabric substrate's surface by exposing the fabric substrate to the plasma of the second plasma source.