US 12,134,596 B2
Compound, resin, composition, resist pattern formation method, circuit pattern formation method and method for purifying resin
Takashi Makinoshima, Hiratsuka (JP); Junya Horiuchi, Hiratsuka (JP); and Masatoshi Echigo, Tokyo (JP)
Assigned to Mitsubishi Gas Chemical Company, Inc., Tokyo (JP)
Appl. No. 16/966,415
Filed by Mitsubishi Gas Chemical Company, Inc., Tokyo (JP)
PCT Filed Jan. 31, 2019, PCT No. PCT/JP2019/003400
§ 371(c)(1), (2) Date Jul. 30, 2020,
PCT Pub. No. WO2019/151400, PCT Pub. Date Aug. 8, 2019.
Claims priority of application No. 2018-015520 (JP), filed on Jan. 31, 2018.
Prior Publication US 2020/0361843 A1, Nov. 19, 2020
Int. Cl. C07C 43/295 (2006.01); C07C 317/22 (2006.01); C07C 321/30 (2006.01); C08G 65/38 (2006.01); G03F 7/022 (2006.01); G03F 7/11 (2006.01); G03F 7/20 (2006.01); G03F 7/40 (2006.01)
CPC C07C 43/295 (2013.01) [C07C 317/22 (2013.01); C07C 321/30 (2013.01); C08G 65/38 (2013.01); G03F 7/022 (2013.01); G03F 7/11 (2013.01); G03F 7/20 (2013.01); G03F 7/40 (2013.01)] 20 Claims
 
1. A compound represented by the following formula (1-1):

OG Complex Work Unit Chemistry
wherein A is sulfur, oxygen, or a sulfonyl group; R1a is a hydrogen atom or a monovalent group having 1 to 10 carbon atoms; R1b is an n-valent aromatic group having 6 to 30 carbon atoms and does not include a heteroatom; R4 to R5 are each independently a linear, branched or cyclic alkyl group having 1 to 30 carbon atoms and optionally having a substituent, an aryl group having 6 to 30 carbon atoms and optionally having a substituent, an alkenyl group having 2 to 30 carbon atoms and optionally having a substituent, an alkynyl group having 2 to 30 carbon atoms and optionally having a substituent, an alkoxy group having 1 to 30 carbon atoms and optionally having a substituent, a halogen atom, a nitro group, an amino group, a carboxylic acid group, a crosslinkable group, a dissociation group, a thiol group or a hydroxy group, wherein the alkyl group, the aryl group, the alkenyl group and the alkoxy group each optionally contain an ether bond, a ketone bond or an ester bond and at least one R4 and/or at least one R5 is a hydroxy group and/or a thiol group; R6 to R7 are each independently an alkyl group having 1 to 30 carbon atoms and optionally having a substituent, an aryl group having 6 to 30 carbon atoms and optionally having a substituent, an alkenyl group having 2 to 30 carbon atoms and optionally having a substituent, an alkynyl group having 2 to 30 carbon atoms and optionally having a substituent, an alkoxy group having 2 to 30 carbon atoms and optionally having a substituent, a halogen atom, a nitro group, an amino group, a carboxylic acid group, a crosslinkable group, a dissociation group, a thiol group or a hydroxy group, wherein the alkyl group, the aryl group, the alkenyl group and the alkoxy group each optionally contain an ether bond, a ketone bond or an ester bond; R10 to R11 are each a hydrogen atom; m4 and m5 are each independently an integer of 0 to 9; m6 and m7 are each independently an integer of 0 to 7; n is an integer of 1 to 4; and p2 to p5 are each independently an integer of 0 to 2.