US 12,134,167 B2
Pad conditioner cleaning system
Shantanu Rajiv Gadgil, Santa Clara, CA (US); Sumit Subhash Patankar, Fremont, CA (US); Nathan Arron Davis, Gilbert, AZ (US); Michael J. Coughlin, Livermore, CA (US); and Allen L D'Ambra, Burlingame, CA (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on May 11, 2023, as Appl. No. 18/316,190.
Application 17/849,576 is a division of application No. 16/932,628, filed on Jul. 17, 2020, granted, now 11,370,083, issued on Jun. 28, 2022.
Application 18/316,190 is a continuation of application No. 17/849,576, filed on Jun. 24, 2022, granted, now 11,648,645.
Claims priority of provisional application 63/045,005, filed on Jun. 26, 2020.
Prior Publication US 2023/0278165 A1, Sep. 7, 2023
Int. Cl. B24B 53/017 (2012.01)
CPC B24B 53/017 (2013.01) 9 Claims
OG exemplary drawing
 
1. A pad conditioner head cleaning tool, comprising:
an arcuate first clamp that curves about an axis and is configured to removably engage a first portion of a sponge against a cylindrical outer surface of a disk-shaped pad conditioner head at a first location;
an arcuate second clamp that curves about the axis and is configured to removably engage a second portion of the sponge against the cylindrical outer surface of the disk-shaped pad conditioner head at a second location;
an arm coupling the first arcuate clamp to the second arcuate clamp such that the arcuate first clamp and the arcuate second clamp are vertically aligned along the axis, and wherein the arm is sufficiently flexible to permit the arcuate first clamp and the arcuate second clamp to splay apart in a direction perpendicular to the axis to be separated to fit around the disk-shaped pad conditioner head and sufficiently tensile to bias the arcuate first clamp and the arcuate second clamp inwardly to press the sponge against an outer surface of a pad conditioner head;
wherein each of the arcuate first clamp and the arcuate second clamp have an inwardly extending upper flange and an inwardly extending lower flange configured to clamp on an upper surface and lower surface, respectively, of the pad conditioner head; and
wherein inner surfaces of each upper flange and each lower flange of both the arcuate first clamp and the arcuate second clamp, respectively comprise a convex surface.