US 12,464,951 B2
Vibration device
Masahiro Fujii, Shiojiri (JP); and Ryuichi Kurosawa, Hara (JP)
Assigned to SEIKO EPSON CORPORATION, (JP)
Filed by Seiko Epson Corporation, Tokyo (JP)
Filed on Mar. 3, 2022, as Appl. No. 17/685,447.
Claims priority of application No. 2021-034182 (JP), filed on Mar. 4, 2021.
Prior Publication US 2022/0285605 A1, Sep. 8, 2022
Int. Cl. H01L 41/053 (2006.01); H10N 30/87 (2023.01); H10N 30/88 (2023.01)
CPC H10N 30/872 (2023.02) [H10N 30/87 (2023.02); H10N 30/88 (2023.02)] 7 Claims
OG exemplary drawing
 
1. A vibration device comprising:
a base having a first surface and a second surface that is in a front-back relationship with the first surface;
a vibrator disposed at the first surface;
an annular resin element that has a third surface bonded to the first surface and a fourth surface that is in a front-back relationship with the third surface, the annular resin element surrounding the vibrator in a plan view in a direction perpendicular to the first surface and side surfaces of the resin element that are coupled to the third surface and the fourth surface are coated with a protective film made of an inorganic material; and
a lid that has a fifth surface and a sixth surface that is in a front-back relationship with the fifth surface, the lid so disposed that the vibrator is sandwiched between the first surface and the fifth surface,
wherein a first metal layer is disposed at a surface containing the fourth surface of the resin element,
a second metal layer is disposed at the fifth surface of the lid, and
the vibrator is encapsulated by the base, the resin element, and the lid when the first metal layer and the second metal layer are bonded to each other.