US 12,464,948 B2
Pressure sensor based on zinc oxide nanowires and method of manufacturing pressure sensor
Ling Li, Beijing (CN); Xuewen Shi, Beijing (CN); Nianduan Lu, Beijing (CN); Congyan Lu, Beijing (CN); Di Geng, Beijing (CN); Xinlv Duan, Beijing (CN); and Ming Liu, Beijing (CN)
Assigned to INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES, Beijing (CN)
Appl. No. 18/250,742
Filed by INSTITUTE OF MICROELECTRONICS, CHINESE ACADEMY OF SCIENCES, Beijing (CN)
PCT Filed Oct. 26, 2020, PCT No. PCT/CN2020/123649
§ 371(c)(1), (2) Date Apr. 26, 2023,
PCT Pub. No. WO2022/087782, PCT Pub. Date May 5, 2022.
Prior Publication US 2023/0371384 A1, Nov. 16, 2023
Int. Cl. H10N 30/074 (2023.01); B82Y 40/00 (2011.01); G01L 1/16 (2006.01); H10D 30/67 (2025.01); H10N 30/067 (2023.01); H10N 39/00 (2023.01)
CPC H10N 30/074 (2023.02) [B82Y 40/00 (2013.01); G01L 1/16 (2013.01); H10D 30/67 (2025.01); H10N 30/067 (2023.02); H10N 39/00 (2023.02)] 13 Claims
OG exemplary drawing
 
1. A method of manufacturing a pressure sensor, comprising:
manufacturing a bottom electrode on a substrate;
manufacturing a seed layer on the bottom electrode;
manufacturing a zinc oxide nanowire layer on the seed layer, wherein the zinc oxide nanowire layer is manufactured by: placing a sample of a ZnO film grown on the bottom electrode in a growth solution of ZnO nanowires to grow the ZnO nanowires at a temperature of 70° C. to 100° C., so as to synthesize the zinc oxide nanowire layer; wherein the zinc oxide nanowire layer has a thickness of 100 nm to 200 nm, the zinc oxide nanowire layer is a regular hexagon with a cross-section diameter of 150 nm, and the zinc oxide nanowire layer has a dense stacked structure; and wherein when the bottom electrode is in contact with the zinc oxide nanowire layer, a potential barrier of 0.65 eV is formed, so as to implement a characteristic of a pressure sensing of the pressure sensor under a voltage of 3 V to 5 V;
manufacturing a support layer on the zinc oxide nanowire layer; and
manufacturing a top electrode on the support layer.