US 12,464,941 B2
Flexible display apparatus and method of manufacturing the same
Sung-Guk An, Yongin-si (KR); and Jun Heo, Yongin-si (KR)
Assigned to Samsung Display Co., Ltd., Yongin-si (KR)
Filed by SAMSUNG DISPLAY CO., LTD., Yongin-si (KR)
Filed on Feb. 1, 2022, as Appl. No. 17/590,611.
Application 17/590,611 is a division of application No. 14/571,114, filed on Dec. 15, 2014, granted, now 11,283,055.
Claims priority of application No. 10-2014-0051904 (KR), filed on Apr. 29, 2014.
Prior Publication US 2022/0158121 A1, May 19, 2022
Int. Cl. H10K 77/10 (2023.01); H10K 50/87 (2023.01); H10K 59/80 (2023.01); H10K 102/00 (2023.01)
CPC H10K 77/111 (2023.02) [H10K 50/87 (2023.02); H10K 59/8794 (2023.02); H10K 2102/311 (2023.02); Y02E 10/549 (2013.01); Y02P 70/50 (2015.11)] 5 Claims
OG exemplary drawing
 
1. A method of manufacturing a flexible display apparatus, the method comprising:
coating a support substrate with a first polymer layer;
carbonizing or graphitizing the first polymer layer;
forming a first barrier layer on the carbonized or graphitized first polymer layer, the first barrier layer contacting the carbonized or graphitized first polymer layer;
coating the first barrier layer with a second polymer layer;
carbonizing or graphitizing the second polymer layer;
forming a second barrier layer on the carbonized or graphitized second polymer layer; and
forming an organic light emitting device on the second barrier layer;
wherein the forming of the second barrier layer comprises forming the second barrier layer to cover the carbonized or graphitized second polymer layer such that at least a portion of the second barrier layer contacts at least a portion of the first barrier layer at an outer portion of the carbonized or graphitized second polymer layer, a portion of the second barrier layer contacts a top surface of the first barrier layer, and a lateral surface of the second barrier layer extends along and contacts an outermost lateral surface of the first barrier layer, the second barrier layer extending beyond the first barrier layer in a plan view,
wherein the first barrier layer has a single layer structure.