US 12,464,605 B2
Active cooling of quartz enveloped heaters in vacuum
Dursun Moore, Austin, TX (US); Julian G. Blake, Gloucester, MA (US); Hillman Bailey, Dripping Springs, TX (US); James D. Strassner, Austin, TX (US); and Paul Forderhase, Austin, TX (US)
Assigned to Applied Materials, Inc., Santa Clara, CA (US)
Filed by Applied Materials, Inc., Santa Clara, CA (US)
Filed on Jan. 25, 2022, as Appl. No. 17/583,755.
Prior Publication US 2023/0239970 A1, Jul. 27, 2023
Int. Cl. H05B 3/00 (2006.01); H01J 37/317 (2006.01); H05B 3/44 (2006.01)
CPC H05B 3/0033 (2013.01) [H01J 37/3171 (2013.01); H05B 3/44 (2013.01); H01J 2237/002 (2013.01); H01J 2237/31701 (2013.01)] 10 Claims
OG exemplary drawing
 
1. A heater assembly, comprising:
one or more heating lamps, each having a filament encased in a tube;
a cooling base, having one or more troughs; wherein each of the one or more heating lamps is disposed in a respective one of the one or more troughs, wherein a region where the heating lamp directly contacts the respective trough is referred to as a contact area;
a reflective coating applied to the tube so as to reflect heat away from the contact area and toward a target to be heated; and
a high emissivity film disposed between and in direct contact with the one or more heating lamps and the respective troughs in the contact area so as to enhance radiative heat transfer,
wherein the high emissivity film is applied to the cooling base in the one or more troughs, such that the reflective coating is disposed between the filament and the high emissivity film.