US 12,464,294 B2
Membrane microelectromechanical electroacoustic transducer
Fabrizio Cerini, Magenta (IT); Silvia Adorno, Novate Milanese (IT); and Marco Salina, Cremosano (IT)
Assigned to STMICROELECTRONICS S.r.l., Agrate Brianza (IT)
Filed by STMICROELECTRONICS S.r.l., Agrate Brianza (IT)
Filed on Apr. 4, 2023, as Appl. No. 18/295,673.
Claims priority of application No. 102022000007043 (IT), filed on Apr. 8, 2022; and application No. 102022000011810 (IT), filed on Jun. 3, 2022.
Prior Publication US 2023/0328456 A1, Oct. 12, 2023
Int. Cl. H04R 17/00 (2006.01); H04R 7/06 (2006.01); H04R 7/18 (2006.01); H10N 30/20 (2023.01)
CPC H04R 17/005 (2013.01) [H04R 7/06 (2013.01); H04R 7/18 (2013.01); H10N 30/20 (2023.02); H04R 2201/003 (2013.01); H04R 2400/11 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A device, comprising:
a microelectromechanical electroacoustic transducer including:
a supporting frame comprising semiconductor material and having a perimeter;
a central axis; and
a membrane of semiconductor material coupled to the supporting frame along the perimeter, the membrane having symmetry about the central axis, and the membrane including:
through slits of elongated shape; and
a piezoelectric actuator on a peripheral portion of the membrane, and
wherein the membrane is divided into cantilever portions by respective slits of the through slits, and
wherein the supporting frame has a rectangular inner perimeter and the cantilever portions include two triangular cantilever portions, having respective bases connected to respective minor sides of the inner perimeter of the supporting frame, and two trapezoidal cantilever portions, having respective major bases connected to respective major sides of the inner perimeter of the supporting frame.