Viktor Plesski, Gorgier (CH); Soumya Yandrapalli, Lausanne (CH); Sean McHugh, Santa Barbara, CA (US); Gregory L. Hey-Shipton, Santa Barbara, CA (US); Garrett Williams, San Mateo, CA (US); Ventsislav Yantchev, Sofia (BG); Andrew Guyette, San Mateo, CA (US); Neal Fenzi, Santa Barbara, CA (US); Jesson John, Dublin, CA (US); Bryant Garcia, Mississauga (CA); Robert B. Hammond, Santa Barbara, CA (US); Patrick Turner, San Bruno, CA (US); Douglas Jachowski, Santa Cruz, CA (US); Greg Dyer, Santa Barbara, CA (US); Chris O′Brien, San Diego, CA (US); Andrew Kay, Provo, UT (US); Albert Cardona, Santa Barbara, CA (US); Dylan Kelly, San Diego, CA (US); Wei Yang, Goleta, CA (US); Marie Chantal Mukandatimana, Santa Barbara, CA (US); and Luke Myers, Santa Barbara, CA (US)
Assigned to MURATA MANUFACTURING CO., LTD., Nagaokakyo (JP)
Filed by Murata Manufacturing Co., Ltd., Nagaokakyo (JP)
Filed on Jun. 16, 2022, as Appl. No. 17/842,657.
Application 17/842,657 is a continuation of application No. 17/131,348, filed on Dec. 22, 2020, granted, now 12,149,229.
Application 17/131,348 is a continuation of application No. 16/924,108, filed on Jul. 8, 2020, granted, now 10,992,284, issued on Apr. 27, 2021.
Application 16/924,108 is a continuation in part of application No. 16/689,707, filed on Nov. 20, 2019, granted, now 10,917,070, issued on Feb. 9, 2021.
Application 16/689,707 is a continuation of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Application 17/842,657 is a continuation in part of application No. 17/317,754, filed on May 11, 2021, granted, now 11,870,424.
Application 17/317,754 is a continuation of application No. 17/109,812, filed on Dec. 2, 2020, granted, now 11,967,945.
Application 17/109,812 is a continuation in part of application No. 16/689,707, filed on Nov. 20, 2019, granted, now 10,917,070, issued on Feb. 9, 2021.
Application 16/689,707 is a continuation of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Application 17/842,657 is a continuation in part of application No. 17/542,295, filed on Dec. 3, 2021, granted, now 12,212,306.
Application 17/542,295 is a continuation in part of application No. 17/351,201, filed on Jun. 17, 2021, granted, now 11,876,498.
Application 17/351,201 is a continuation of application No. 16/988,213, filed on Aug. 7, 2020, granted, now 11,201,601, issued on Dec. 14, 2021.
Application 16/988,213 is a continuation in part of application No. 16/438,121, filed on Jun. 11, 2019, granted, now 10,756,697, issued on Aug. 25, 2020.
Application 16/438,121 is a continuation in part of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Application 17/842,657 is a continuation in part of application No. 17/125,960, filed on Dec. 17, 2020, granted, now 11,949,402.
Application 17/842,657 is a continuation in part of application No. 17/134,213, filed on Dec. 25, 2020, granted, now 12,021,496.
Application 17/842,657 is a continuation in part of application No. 17/097,238, filed on Nov. 13, 2020, granted, now 11,955,952.
Application 17/125,960 is a continuation of application No. 16/727,304, filed on Dec. 26, 2019, granted, now 10,917,072, issued on Feb. 9, 2021.
Application 17/842,657 is a continuation in part of application No. 17/189,246, filed on Mar. 1, 2021, granted, now 11,916,539.
Application 17/842,657 is a continuation in part of application No. 17/109,848, filed on Dec. 2, 2020, granted, now 12,034,428.
Application 17/189,246 is a continuation of application No. 17/030,050, filed on Sep. 23, 2020, granted, now 10,985,728, issued on Apr. 20, 2021.
Application 17/030,050 is a continuation in part of application No. 16/920,173, filed on Jul. 2, 2020, granted, now 11,139,794, issued on Oct. 5, 2021.
Application 16/920,173 is a continuation of application No. 16/438,121, filed on Jun. 11, 2019, granted, now 10,756,697, issued on Aug. 25, 2020.
Application 16/438,121 is a continuation in part of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Application 17/842,657 is a continuation in part of application No. 17/122,977, filed on Dec. 15, 2020, granted, now 11,509,279.
Application 17/842,657 is a continuation in part of application No. 17/133,857, filed on Dec. 24, 2020, granted, now 11,996,825.
Application 17/122,977 is a continuation in part of application No. 17/070,694, filed on Oct. 14, 2020, granted, now 11,329,628.
Application 17/842,657 is a continuation in part of application No. 17/520,689, filed on Nov. 7, 2021, granted, now 12,028,049.
Application 17/520,689 is a continuation in part of application No. 17/189,246, filed on Mar. 1, 2021, granted, now 11,916,539.
Application 17/842,657 is a continuation in part of application No. 17/706,154, filed on Mar. 28, 2022.
Application 17/706,154 is a continuation of application No. 17/022,048, filed on Sep. 15, 2020, granted, now 11,349,452, issued on May 31, 2022.
Application 17/022,048 is a continuation of application No. 16/924,105, filed on Jul. 8, 2020, granted, now 10,868,513, issued on Dec. 15, 2020.
Application 16/924,105 is a continuation in part of application No. 16/829,617, filed on Mar. 25, 2020, granted, now 10,868,512, issued on Dec. 15, 2020.
Application 16/829,617 is a continuation of application No. 16/578,811, filed on Sep. 23, 2019, granted, now 10,637,438, issued on Apr. 28, 2020.
Application 16/578,811 is a continuation in part of application No. 16/230,443, filed on Dec. 21, 2018, granted, now 10,491,192, issued on Nov. 26, 2019.
Application 17/842,657 is a continuation in part of application No. 17/408,264, filed on Aug. 20, 2021, granted, now 12,113,512.
Application 17/842,657 is a continuation in part of application No. 17/460,077, filed on Aug. 27, 2021, granted, now 12,155,371.
Application 17/842,657 is a continuation in part of application No. 17/588,803, filed on Jan. 13, 2022, granted, now 12,155,374.
Claims priority of provisional application 62/685,825, filed on Jun. 15, 2018.
Claims priority of provisional application 62/701,363, filed on Jul. 20, 2018.
Claims priority of provisional application 62/741,702, filed on Oct. 5, 2018.
Claims priority of provisional application 62/748,883, filed on Oct. 22, 2018.
Claims priority of provisional application 62/753,815, filed on Oct. 31, 2018.
Claims priority of provisional application 63/228,990, filed on Aug. 3, 2021.
Claims priority of provisional application 62/892,980, filed on Aug. 28, 2019.
Claims priority of provisional application 62/904,152, filed on Sep. 23, 2019.
Claims priority of provisional application 63/087,792, filed on Oct. 5, 2020.
Claims priority of provisional application 63/072,595, filed on Aug. 31, 2020.
Claims priority of provisional application 62/865,798, filed on Jun. 24, 2019.
Claims priority of provisional application 62/983,403, filed on Feb. 28, 2020.
Claims priority of provisional application 62/904,233, filed on Sep. 23, 2019.
Claims priority of provisional application 63/053,584, filed on Jul. 18, 2020.
Claims priority of provisional application 63/088,344, filed on Oct. 6, 2020.
Claims priority of provisional application 63/040,440, filed on Jun. 17, 2020.
Claims priority of provisional application 63/167,510, filed on Mar. 29, 2021.
Claims priority of provisional application 63/167,506, filed on Mar. 29, 2021.
Claims priority of provisional application 63/169,875, filed on Apr. 2, 2021.
Prior Publication US 2022/0393666 A1, Dec. 8, 2022
a substrate including a base and an intermediate layer;
a piezoelectric layer attached to a surface of the substrate, portions of the piezoelectric layer forming one or more diaphragms that are over respective cavities in the intermediate layer;
a conductor pattern on a surface of the piezoelectric layer, the conductor pattern including a plurality of interdigital transducers (IDTs) of a plurality of resonators, interleaved fingers of each of the plurality of IDTs disposed on a respective diaphragm of the one or more diaphragms;
a first dielectric layer having a first thickness disposed on and between the interleaved fingers of the IDTs of a first subset of the plurality of resonators; and
a second dielectric layer having a second thickness greater than the first thickness disposed on and between the interleaved fingers of the IDTs of a second subset of the plurality of resonators, wherein the first subset and the second subset are not identical to each other,
wherein each IDT comprises a first busbar, a second busbar, and interleaved fingers extending alternately from the first and second busbars, wherein overlapping portions of the interleaved fingers are disposed on the respective diaphragm, and at least portions of both the first and second busbars are disposed on a supported portion of the piezoelectric layer that does not form part of the diaphragm.
