US 12,463,616 B2
Acoustic wave device with ceramic substrate
Rei Goto, Osaka (JP); Hironori Fukuhara, Ibaraki (JP); Hiroyuki Nakamura, Osaka-Fu (JP); and Keiichi Maki, Suita (JP)
Assigned to Skyworks Solutions, Inc., Irvine, CA (US)
Filed by Skyworks Solutions, Inc., Irvine, CA (US)
Filed on Jul. 2, 2024, as Appl. No. 18/762,466.
Application 18/762,466 is a continuation of application No. 16/680,136, filed on Nov. 11, 2019, granted, now 12,063,027.
Claims priority of provisional application 62/770,644, filed on Nov. 21, 2018.
Prior Publication US 2024/0356519 A1, Oct. 24, 2024
This patent is subject to a terminal disclaimer.
Int. Cl. H03H 9/02 (2006.01); H03H 9/58 (2006.01); H03H 9/05 (2006.01)
CPC H03H 9/02574 (2013.01) [H03H 9/581 (2013.01); H03H 9/058 (2013.01)] 20 Claims
OG exemplary drawing
 
1. A surface acoustic wave device comprising:
a ceramic substrate having a scattering surface;
a piezoelectric layer over the scattering surface of the ceramic substrate, the piezoelectric layer having a first area with a wavy or irregular pattern indicative of wave scattering at the scattering surface; and
an interdigital transducer electrode disposed over a second area of the piezoelectric layer.