US 12,463,561 B2
Electrostatic chuck
Hyunjun Lee, Yongin-si (KR); Jinwook Kim, Yongin-si (KR); Hyoseung Kim, Yongin-si (KR); Sangil Nam, Yongin-si (KR); and Jaegu Ji, Yongin-si (KR)
Assigned to SAMSUNG DISPLAY CO., LTD., Gyeonggi-Do (KR)
Filed by Samsung Display Co., LTD., Yongin-si (KR)
Filed on May 4, 2023, as Appl. No. 18/143,340.
Claims priority of application No. 10-2022-0070995 (KR), filed on Jun. 10, 2022.
Prior Publication US 2023/0402943 A1, Dec. 14, 2023
Int. Cl. H02N 13/00 (2006.01)
CPC H02N 13/00 (2013.01) 17 Claims
OG exemplary drawing
 
1. An electrostatic chuck comprising:
an adsorption area in which an electrode pattern is disposed and to which an object is adsorbed, wherein the electrode pattern includes an electrode;
an outer area around the adsorption area; and
a detection pattern disposed in the outer area and surrounding at least a portion of the adsorption area, wherein the detection pattern includes a detection line connected to, and integrally formed with, the electrode.