US 12,463,404 B2
Vertical cavity surface emitting laser element, vertical cavity surface emitting laser element array, vertical cavity surface emitting laser module, and method of producing vertical cavity surface emitting laser element
Tomomasa Watanabe, Tokyo (JP); Hiroshi Nakajima, Tokyo (JP); and Mikihiro Yokozeki, Tokyo (JP)
Assigned to SONY GROUP CORPORATION, Tokyo (JP)
Appl. No. 17/756,999
Filed by SONY GROUP CORPORATION, Tokyo (JP)
PCT Filed Dec. 8, 2020, PCT No. PCT/JP2020/045571
§ 371(c)(1), (2) Date Jun. 7, 2022,
PCT Pub. No. WO2021/124968, PCT Pub. Date Jun. 24, 2021.
Claims priority of application No. 2019-230750 (JP), filed on Dec. 20, 2019.
Prior Publication US 2023/0008483 A1, Jan. 12, 2023
Int. Cl. H01S 5/00 (2006.01); H01S 5/02 (2006.01); H01S 5/02253 (2021.01); H01S 5/183 (2006.01); H01S 5/30 (2006.01); H01S 5/42 (2006.01); H01S 5/042 (2006.01)
CPC H01S 5/423 (2013.01) [H01S 5/0215 (2013.01); H01S 5/02253 (2021.01); H01S 5/18305 (2013.01); H01S 5/18311 (2013.01); H01S 5/18377 (2013.01); H01S 5/1838 (2013.01); H01S 5/3095 (2013.01); H01S 5/04257 (2019.08); H01S 5/18369 (2013.01); H01S 5/18388 (2013.01)] 18 Claims
OG exemplary drawing
 
1. A vertical cavity surface emitting laser element, comprising:
a first substrate that includes a first material and an active layer;
a second substrate that includes a second material, wherein
the second substrate is bonded to the first substrate,
light having a specific wavelength is transmittable through the second material, and
the second material is different from the first material;
a first distributed Bragg reflector (DBR) layer on a side of the first substrate opposite to the second substrate,
wherein the first DBR layer is configured to reflect the light having the specific wavelength;
a second DBR layer on a side of the second substrate opposite to the first substrate,
wherein the second DBR layer is configured to reflect the light having the specific wavelength; and
a third substrate on the side of the first substrate opposite to the second substrate, wherein
the first DBR layer is on a side of the third substrate opposite to the first substrate, and
the third substrate includes a third material having a thermal conductivity higher than that of the first material.